Thin Solid Films · 2011 · 20 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsNitride Thin FilmsNitrides Thin FilmsPlasma DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced Deposition
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F. Tuinstra, Jack L. Koenig · The Journal of Chemical Physics · 1970 · 10.6K citations
Natural Sciences, Materials Engineering, Materials Science +15
John Robertson · Materials Science and Engineering R Reports · 2002 · 6.1K citations