Effects of rf power on the structural properties of carbon nitride thin films prepared by plasma enhanced chemical vapour deposition

Maisara Othman, Richard Ritikos, Noor Hamizah Khanis, Nur Maisarah Abdul Rashid, Saadah Abdul Rahman, Siti Meriam Ab. Gani, Muhamad Rasat Muhamad

Thin Solid Films · 2011 · 20 citations · 30 references

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