Plasma Sources Science and Technology · 2003 · 13 citations · 12 references
Natural SciencesElectrical EngineeringPhysicsAntennasElectromagneticsPlasma PhysicsElectromagnetic WavesHelical AntennasLow-temperature PlasmasPlasma ElectrodynamicsPlasma SheathsPlasma-wall InteractionsAntenna-plasma InteractionDensityPlasma Antenna CouplingPlasma Density ProfilingPlasma Power CouplingRadio Frequency SputteringSelf-sputteringVacuum Vessel Design
A plasma source excited by a double saddle helicon antenna outside the glass vacuum vessel has been modified by inserting a second copper antenna in contact with the plasma through the glass end plate. Both have the same frequency of 13.56 MHz but have a
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Plasma Sheath Formation by Radio-Frequency Fields
H.S. Butler, G. S. Kino · The Physics of Fluids · 1963 · 215 citations