An analytical model of planar inductors on lowly doped silicon substrates for high frequency analog design up to 3 GHz

Abstract

An analytical model for planar inductors in air or on lowly doped substrates has been introduced. The model parameters have been fitted by means of electromagnetic simulation and its validity has been verified with measurement results. In this paper it has also been shown how this analytical model can be used to gain a better insight in technology, layout and design trade-off's.