Si IC-compatible inductors and LC passive filters

Abstract

Passive inductors and LC filters fabricated in standard Si IC technology are demonstrated. Q-factors from three to eight and inductors up to 10 nH in the gigahertz range have been realized. Measurements on a five-pole maximally flat low-pass filter give midband insertion loss and -3 dB bandwidth close to the nominal design values of 2.25 dB and 880 MHz.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>