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Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography

Materials ScienceEngineeringSurface PhenomenaBeam LithographyMicrofabricationOptical PropertiesElectron-beam LithographySurface ScienceApplied PhysicsNanolithography MethodOptoelectronicsGraded-reflectivity MirrorsDepth-graded Multilayer CoatingExtreme Ultraviolet