Journal of Crystal Growth · 1992 · 26 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsEpitaxial GrowthSemiconductor Crystal GrowthAtomic Layer EpitaxyCompositional HeterogeneityMetalorganic Vapor Phase Epitaxy
3
A new versatile, large size MOVPE reactor
P. Frijlink · Journal of Crystal Growth · 1988 · 108 citations