The electrolysis of water: an actuation principle for MEMS with a big opportunity - Concepedia

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The electrolysis of water: an actuation principle for MEMS with a big opportunity

78

Citations

1

References

2000

Year

C.R. Neagu, Henri Jansen, Han Gardeniers, M. Elwenspoek

Electrical EngineeringElectrohydrodynamicsEngineeringMicrofabricationWater ElectrolysisApplied PhysicsInterfacial PhenomenaMicroactuatorMicro-electromechanical SystemActuation PrincipleElectrolysis Of WaterElectrochemistryBig Opportunity

References

	Year	Citations

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