Doping of Silicon by Neutron Irradiation

Abstract

Pure undoped Si is doped by neutron transmutation by using the reaction /sup 30/Si + n = /sup 31/Si + ..gamma.. = /sup 31/P + ..beta... The damage from this neutron bombardment is annealed, resulting in homogeneous doping of the Si. This method of doping results in smaller spreading and radial resistance than other methods. (WDM)