Laser-induced hydrocarbon contamination in vacuum

Abstract

We investigated laser-induced deposition processes on BK7 substrates under the influence of pulsed Q-switched Nd:YAG laser radiation, starting from small toluene partial pressures in a background vacuum environment. The composition and structure of the deposit was analyzed using microscopic methods like Nomarski DIC, dark-field and white-light interference microscopy, TEM, EDX and XPS. We found a distinct threshold for deposition built-up dependant on the partial pressure of toluene (0.2 J/cm² at 0.1 mbar, 0.8 J/cm² at 0.01 mbar toluene). The deposits strictly followed the spherical geometry of the laser spot. No deposit accumulated on MgF₂ AR coated BK7 samples even at high toluene partial pressures. The onset of deposit was accompanied by periodic surface ripples formation. EDX and XPS analysis showed a carbon-like layer which strongly absorbed the 1 μm laser radiation. The typical number of shots applied was 50 000. In addition, long term lifetime tests of more than 5 Mio. shots per site were run.