Publication | Closed Access
Self-organized patterning on Si(001) by ion sputtering with simultaneous metal incorporation
36
Citations
51
References
2011
Year
Materials EngineeringMaterials ScienceIon ImplantationSelf-organized PatterningEngineeringSimultaneous Metal IncorporationPhysicsMicrofabricationSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsNanolithography Method
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