Diffusional creep induced stress relaxation in thin Cu films on silicon

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

Materials Science, Engineering, Mechanical Engineering +6

Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history

P. A. Flinn, Donald S. Gardner, William D. Nix · IEEE Transactions on Electron Devices · 1987 · 583 citations

Engineering, Mechanical Engineering, Film Composition +21

Quantitative analysis of strengthening mechanisms in thin Cu films: Effects of film thickness, grain size, and passivation

R. Keller, Shefford P. Baker, Eduard Arzt · Journal of materials research/Pratt's guide to venture capital sources · 1998 · 259 citations

Materials Science, Engineering, Severe Plastic Deformation +10

Yielding and strain hardening of thin metal films on substrates

William D. Nix · Scripta Materialia · 1998 · 220 citations · Full text

Engineering, Severe Plastic Deformation, Mechanical Engineering +16