Publication | Closed Access
NANOCRYSTALLINE DIAMOND FILMS
885
Citations
101
References
1999
Year
EngineeringNanosystemsChemistryGrain Boundary CarbonCarbon-based MaterialCarbon DimerNanostructure SynthesisNanometrologyMaterials ScienceCrystalline DefectsNanotechnologyNanomanufacturingNanostructuringNanocrystalline MaterialDiamond-like CarbonNanomaterialsApplied PhysicsNanocrystalline Diamond FilmsThin FilmsNanostructures
Nanocrystalline diamond films are unique new materials with applications in fields as diverse as tribology, cold cathodes, corrosion resistance, electrochemical electrodes, and conformal coatings on MEMS devices. The synthesis of nanocrystalline diamond films from carbon‑containing noble gas plasmas is described. The authors achieve nanocrystalline diamond growth by inserting C₂ dimers into bonds, yielding high nucleation rates, and by tuning the noble gas/hydrogen ratio to transition from micro‑ to nanocrystallinity. Extensive characterization shows phase‑pure diamond with 3–15 nm crystallites, up to 10 % of carbon at 2–4 atom‑wide grain boundaries, and that π‑bonded grain boundary carbon profoundly alters mechanical, electrical, and optical properties.
▪ Abstract The synthesis of nanocrystalline diamond films from carbon-containing noble gas plasmas is described. The nanocrystallinity is the result of new growth and nucleation mechanisms, which involve the insertion of C 2 , carbon dimer, into carbon-carbon and carbon-hydrogen bonds, resulting in hetereogeneous nucleation rates on the order 10 10 cm −2 s −1 . Extensive characterization studies led to the conclusion that phase-pure diamond is produced with a microstructure consisting of randomly oriented 3–15-nm crystallites. By adjusting the noble gas/hydrogen ratio in the gas mixture, a continuous transition from micro- to nanocrystallinity is achieved. Up to 10% of the total carbon in the nanocrystalline films is located at 2 to 4 atom-wide grain boundaries. Because the grain boundary carbon is π-bonded, the mechanical, electrical, and optical properties of nanocrystalline diamond are profoundly altered. Nanocrystalline diamond films are unique new materials with applications in fields as diverse as tribology, cold cathodes, corrosion resistance, electrochemical electrodes, and conformal coatings on MEMS devices.
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