Publication | Closed Access
Engineered HTS microbridges
62
Citations
16
References
1991
Year
Materials EngineeringElectrical EngineeringEpitaxial GrowthEngineeringRf SemiconductorAdvanced Packaging (Semiconductors)Rf SquidsApplied PhysicsStep-edge MicrobridgesSemiconductor Device FabricationElectronic PackagingEngineered Hts MicrobridgesMicroelectronicsMolecular Beam EpitaxyHigh-yield Processes
A variety of techniques to reproducibly engineer microbridges in high-quality epitaxial YBCO films exist. A report is presented on two such techniques that have resulted in high-yield processes for fabricating both DC and RF SQUIDs operating at temperatures as high as 82 K. The results of these devices (step-edge microbridges) and focused-ion-beam microbridges) are compared with those of several other structures under investigation by other researchers.
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