Operating and beam characteristics, including spectral narrowing, of a TEA rare-gas halide excimer laser

Abstract

A simple TEA excimer laser has been developed having a fast discharge with distributed preionization. The output pulses are short (∼7 ns), of high peak power (5-15 MW), and good reproducibility. Narrow linewidth (<1 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> ), and tunability (∼0.8 nm) have been obtained with KrF using a grating at grazing incidence.