Efficient Raman shifting of ArF and KrF laser wavelengths

Abstract

A series of uv lines has been generated in the region 190–360 nm by multiple Raman scatterings of the ArF and KrF laser wavelengths. ArF has been shifted in H2 and KrF shifted in H2, D2, and CH4. For the optimized case of KrF pumping H2, better than 50% energy conversion was observed to the first Stokes at 2769 Å.