Oscillation-Based Prebond TSV Test

Abstract

Testing the quality of prebond through-silicon vias (TSV) is a vital part of the Known-Good-Die test that is often necessary to retain a high compound yield for 3-D stacked integrated circuits. In this paper, we present a versatile prebond TSV test method applicable before wafer thinning when the deep end of the TSV is inaccessible as buried in the still-thick wafer. Technical merits include: 1) the ability to handle both the resistive open fault and the leakage fault in the same test structure; 2) a capability that allows an user to have a better measure of the severity of the fault; and 3) an all-digital and easy to implement design-for-testability circuit.