Publication | Closed Access
Optical Phonons in Amorphous Silicon Oxides. II. Calculation of Phonon Spectra and Interpretation of the IR Transmission of SiO<sub><i>x</i></sub>
68
Citations
17
References
1984
Year
Optical MaterialsEngineeringAmorphous Silicon OxidesVibrational ModesOptoelectronic DevicesOptical CharacterizationSilicon On InsulatorOptical PropertiesIr TransmissionThin Film ProcessingMaterials SciencePhysicsCrystalline DefectsSemiconductor MaterialPhonon SpectraReactive SputteringMaterial AnalysisApplied PhysicsCondensed Matter PhysicsPhononIr Response FunctionThin FilmsAmorphous Solid
Abstract Basing on the theoretical investigations of Part I of this work a simple model for the calculation of the density of vibrational modes and of the IR response function of the geometrically and chemically disordered material SiO x (0 < x ≦ 2) is developed. This model leads for the first time to a theoretical interpretation of LO—TO splittings and of chemical shifts of the minima of IR transmission spectra of thin SiO x films prepared by reactive sputtering.
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