Thin Solid Films · 1996 · 12 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials CharacterizationThin FilmsChemical Vapor DepositionElectronic Material CharacterizationMetalsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsMetal Thin FilmsMetal-organic Chemical Vapor DepositionMetallic Thin FilmsMicrostructural ChangeMicrostructural CharacterizationThin Film Surface Characterization
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Single source MOCVD of epitaxial oxide thin films
R. Hiskes, Steve DiCarolis, R. D. Jacowitz et al. · Journal of Crystal Growth · 1993 · 47 citations
Natural Sciences, Materials Engineering, Materials Science +14