Publication | Closed Access
Design, modeling, and testing of a novel 6-DOF micropositioning stage with low profile and low parasitic motion
25
Citations
20
References
2010
Year
EngineeringLow ProfileMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsMicroscale SystemMicroactuatorMicropositioningLow Parasitic MotionMicro-electromechanical System
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