Thermomechanical Lithography: Pattern Replication Using a Temperature Gradient Driven Instability

Abstract

A capillary surface instability caused by a high temperature gradient is used to replicate sub‐micrometer patterns (see Figure for an example). As opposed to convection effects, the film instability is driven by the diffusion of heat across the polymer film. By lateral modulation of the temperature gradient, this instability can be harnessed as a lithographic technique.