Microelectronic Engineering · 2001 · 46 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOpticsPhotonicsElectron Beam LithographyInfrared Optical MaterialsIntegrated PhotonicsPhotonic CrystalsPhotonic MaterialsTwo-dimensional NanomaterialsDevice FabricationInfrared Optical CrystalsNanofabrication Of Photonic StructuresOptical LithographyPhotonic Crystal DevicesTwo-dimensional Photonic Crystals
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