Measurement Science and Technology · 1993 · 42 citations · 8 references
Natural SciencesMechatronics EngineeringEquipmentMicroelectromechanical SystemsOpticsAtomic Force MicroscopyFiber OpticsForce SensorsInterferometryOptical FibersOptical InstrumentsCantilever Deflection DetectionCantilever MechanicsFiber Optic InstrumentsForce-distance CurvesInterferometer DesignOptical Scanners
The authors have built a fibre optic force microscope scan head which scans the cantilever relative to a fixed sample. The design enables the fibre-to-cantilever distance to be altered by moving the fibre relative to the fixed cantilever. This design feature is particularly important when using the variable deflection mode and for acquiring force versus distance curves. The interferometer system reaches a resolution of 0.01 nm (peak-to-peak).
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G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text
Surface Studies by Scanning Tunneling Microscopy
G. Binnig, H. Rohrer, Ch. Gerber et al. · Physical Review Letters · 1982 · 4.6K citations · Full text
Force microscope using a fiber-optic displacement sensor
D. Rugar, H. J. Mamin, R. Erlandsson et al. · Review of Scientific Instruments · 1988 · 269 citations