Publication | Closed Access

On the size-dependent behavior of a capacitive circular micro-plate considering the variable length-scale parameter

Size-dependent BehaviorEngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringVariable Length-scale ParameterMicroscale SystemMicro-electromechanical SystemThin-walled StructureCapacitive Circular Micro-plate