Journal of Physics Conference Series · 2007 · 77 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceAcousticsMicrofabricationThin FilmsAcoustic MaterialsAcoustic Signal ProcessingAcoustic Wave PropagationOxide SemiconductorsThin-film DepositionUltrasonicsAcoustic Phase VelocityFilm ThicknessRayleigh Wave AnalysisSignal ReflectionSiliconSurface Acoustic WavesThin Oxide LayersZinc Oxides
High quality, c-axis oriented zinc oxide (ZnO) thin films were grown on silicon substrate using RF magnetron sputtering. Surface acoustic wave (SAW) devices were fabricated with different thickness of ZnO ranging from 1.2 to 5.5 μmUm and the frequency responses were characterized using a network analyzer. Thick ZnO films produce the strongest transmission and reflection signals from the SAW devices. The SAW propagation velocity is also strongly dependent on ZnO film thickness. The performance of the ZnO SAW devices could be improved with addition of a SiO2layer, in name of reflection signal amplitude and phase velocity of Rayleigh wave.
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Optically pumped lasing of ZnO at room temperature
Darren M. Bagnall, Y. F. Chen, Z. Q. Zhu et al. · Applied Physics Letters · 1997 · 2.2K citations
RETRACTED: Recent progress in processing and properties of ZnO
S. J. Pearton, D. P. Norton, K. Ip et al. · Progress in Materials Science · 2004 · 1.7K citations
Natural Sciences, Materials Engineering, Materials Science +8