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Low-power consumption silica-based 2 x 2 thermooptic switch using trenched silicon substrate
49
Citations
8
References
1999
Year
Optical MaterialsEngineeringX 2Optoelectronic DevicesMicro-optical ComponentSilicon On InsulatorElectric Power ConsumptionNanoelectronicsOptical PropertiesTrenched Silicon SubstrateOptical SwitchingMaterials SciencePhotonicsElectrical EngineeringMicroelectronicsTimes/2 Thermooptic SwitchThermooptic SwitchMicrofabricationApplied PhysicsConventional SwitchOptoelectronics
We propose a silica-based 2/spl times/2 thermooptic switch using heat insulating grooves and trenches on a Si substrate to reduce electric power consumption. The switching power of a fabricated switch was successfully reduced to 135 mW, less than 1/3 that of a conventional switch. No detrimental effect on optical characteristics was observed: we obtained the insertion loss of 1 dB, the extinction ratio of better than 30 dB and no polarization dependency.
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