Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 10 citations · 2 references
A novel method of eliminating sensor defects is presented. The autocalibration method uses an on-chip actuator to generate reference signals to correct the sensor characteristics, ensuring reliable and accurate measurements. Autocalibration also eliminates the necessity of calibration at manufacturing, or during the lifetime of the sensor. This considerably reduces the cost of mass produced sensors.
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Piezo-Hall coefficients of <i>n</i>-type silicon
B. Hälg · Journal of Applied Physics · 1988 · 66 citations