Publication | Closed Access
Temperature and reactive etching effects on the microstructure of microwave plasma deposited diamond films
35
Citations
4
References
1990
Year
Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringMicrofabricationMaterials FabricationMicrowave PlasmaApplied PhysicsDiamond FilmsMicroelectronicsPlasma EtchingReactive Etching EffectsPlasma ProcessingPlasma Application
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