Focused Ion Beam Micro- and Nanoengineering - Concepedia

Concepedia

Publication | Closed Access

Focused Ion Beam Micro- and Nanoengineering

109

Citations

58

References

2007

Year

R. M. Langford, Philipp M. Nellen, J. Giérak

Ion Beam Micro-Ion ImplantationEngineeringNanoengineeringMicrofabricationNanotechnologyNanomanufacturingApplied PhysicsIon BeamNanofabricationMicroelectronics

References

	Year	Citations

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