Publication | Closed Access

Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films

Materials EngineeringMaterials ScienceEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsDc MagnetronThin FilmsChemical DepositionSurface MorphologyChemical Vapor DepositionThin Film Processing