Publication | Closed Access
Preparation of Silicon Nitride from Silica
111
Citations
7
References
1984
Year
Materials EngineeringMaterials ScienceN 4Molecular SieveEngineeringMicrofabricationSurface ScienceSiliceneNucleationN 2ChemistrySi 3Chemical KineticsSilicon On InsulatorSilicon Nitride
The nucleation and growth of Si 3 N 4 from a carbon‐Si0 2 mixture in an N 2 atmosphere at 1400°C was studied by varying the specific surface area, particle size, and distribution of the Si0 2 and carbon. Si 3 N 4 yield increased and particle size decreased with increasing Si0 2 and carbon specific surface area. Manner of distribution appeared to have little effect but was difficult to assess. A model was proposed in which heterogeneous nucleation occurs on either the Si0 2 or C surfaces only in the early stages of the reaction. Growth occurs by the reaction
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