Design and operating characteristics of a metalorganic vapor phase epitaxy production scale, vertical, high speed, rotating disk reactor - Concepedia

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Design and operating characteristics of a metalorganic vapor phase epitaxy production scale, vertical, high speed, rotating disk reactor

16

Citations

15

References

1994

Year

Gary S. Tompa, P. Zawadzki, K. Moy, M.A. McKee, Alan Thompson, A. Gurary, E. Wolak, P. Esherick, W.G. Breiland, G.H. Evans,

Journal of Crystal Growth

Electrical EngineeringEngineeringDisk ReactorHigh SpeedNuclear Reactors

References

	Year	Citations

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