Publication | Open Access
Metal-assisted chemical etching in HF/Na2S2O8 OR HF/KMnO4 produces porous silicon
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Citations
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References
2004
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringNanoporous MaterialMicrofabricationSurface ScienceSemiconductor Device FabricationChemistrySilicon On InsulatorMicroelectronicsPlasma EtchingPorous Silicon
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