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Natural SciencesMaterials EngineeringMaterials ScienceSpectroscopySurface ScienceThin FilmsElectron MicroscopyIon ImplantationPhotoelectron SpectroscopySemiconductor Device MaterialsX-ray Photoelectron SpectroscopyX-ray SpectroscopyImplantation Through Thin FilmsIon Implantation EffectsThin Film Growth Monitoring
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Olle Björneholm, F. Federmann, F. Fössing et al. · Physical Review Letters · 1995 · 146 citations · Full text
Natural Sciences, Chemistry, Physics +17
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Argon incorporation in Si(100) by ion bombardment at 15–100 eV
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