A statistical model for material removal prediction in polishing

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J. A. Greenwood, J. B. P. Williamson · Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1966 · 5.6K citations

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The Contact of Two Nominally Flat Rough Surfaces

J. A. Greenwood, J. H. Tripp · Proceedings of the Institution of Mechanical Engineers · 1970 · 1.7K citations

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Jianfeng Luo, David Dornfeld · IEEE Transactions on Semiconductor Manufacturing · 2001 · 641 citations

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A micro-contact and wear model for chemical–mechanical polishing of silicon wafers

Yongwu Zhao, L. Chang · Wear · 2002 · 301 citations

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Scott R. Runnels, L. Michael Eyman · Journal of The Electrochemical Society · 1994 · 246 citations

Engineering, Materials Engineering, Materials Science +13