SiC thin-film thermistors

Abstract

A thermistor using an RF-sputtered SiC film has been developed as a temperature sensor for cooking products. Since the SiC film has the advantage of being able to detect temperatures over the wide range of 0-500 degrees C with a good thermal stability, the thermistor can be applied not only to a conventional oven but also to a pyrolytic self-cleaning oven. Since the thermistor can detect surface temperatures with a rapid thermal response by contacting physically with an outer surface of an object, it can be also applied to a surface cooking top. The construction, electrical properties, and forming method of the SiC thin-film thermistor and applications to cooking products are described.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>