Physical Review Letters · 1985 · 69 citations · 8 references
Materials SciencePattern FormationSi FilmsEngineeringEpitaxial GrowthPhysicsSurface ScienceApplied PhysicsCondensed Matter PhysicsSquare RootDefect FormationSemiconductor Device FabricationThin FilmsPulsed Laser DepositionAmorphous SolidThin Film ProcessingMicrostructureMolten Zone
We develop a model for the recrystallization of Si films that are traversed by a molten zone. The model simulates the branching behavior of low-angle grain-boundary defects in these films to a remarkable degree. The simulated subboundary patterns scale approximately as the square root of the scan velocity, in excellent agreement with experiment.
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