Publication | Closed Access
Low energy ion beam smoothening of artificially synthesized single crystal diamond chips with initial surface roughness of 0.08–0.4nm rms
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Citations
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References
2011
Year
Materials ScienceElectrical EngineeringIon ImplantationEngineeringMicrofabricationNanotechnologyApplied PhysicsIon Beam InstrumentationIon BeamInitial Surface RoughnessMicroelectronicsLow Energy Ion
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