IEEE/ASME Transactions on Mechatronics · 2009 · 188 citations · 40 references
Feedforward ControlEngineeringHigh-performance TrackingNanotechnologyMechanical EngineeringMechatronicsMechanical SystemsNano Electro Mechanical SystemActive Vibration ControlNonlinear Vibration ControlLoad ForceForce FeedbackMicropositioningActuator Load ForceNanopositioning StageVibration ControlNanomechanicsFeed Forward (Control)
The transfer function from actuator voltage to load force has a zero‑pole ordering that simplifies the design of a tracking and damping controller. The study aims to use the actuator load force of a nanopositioning stage as a feedback variable to achieve tracking and damping. The authors implement a force‑feedback controller that leverages the load force measurement for tracking and damping. The force‑feedback controller delivers exceptional tracking and damping, boosting closed‑loop bandwidth from 210 Hz to 2.07 kHz, raising gain margin from 5 dB to infinity, and guaranteeing stability and insensitivity to resonance frequency changes.
In this study, the actuator load force of a nanopositioning stage is utilized as a feedback variable to achieve both tracking and damping. The transfer function from the applied actuator voltage to the measured load force exhibits a zero-pole ordering that greatly simplifies the design and implementation of a tracking and damping controller. Exceptional tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in the closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with a force-feedback control). Gain margin is simultaneously improved from 5 dB to infinity.
40