Sensors and Actuators A Physical · 2012 · 264 citations · 75 references
EngineeringMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySensorsMems SensorsMetal Oxide NanomaterialsMetal OxidesMicroelectromechanical SensorsOxide SemiconductorsSensor MaterialsCopper Oxide NanostructuresMetal Oxide Sensor MaterialsNanostructured Sensor MaterialsSensor ApplicationsZinc Oxide NanostructuresZinc Oxides
Detection of chemicals and biological species is an important issue to human health and safety. In this paper, we report the hydrothermal synthesis at 95 °C of Cu-doped ZnO low-dimensional rods for room-temperature (RT) sensing applications and enhanced sensor performances. X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, Raman and photoluminescence are used to characterize the material properties. To demonstrate the suitability of the Cu-doped ZnO rods for gas sensor applications and for comparison with pure ZnO, we fabricated a double rod device using Focused Ion Beam. The responses of pure-ZnO and Cu-doped ZnO rods studied in exactly the same condition are reported. We found that Cu-ZnO sensors have enhanced RT sensitivity, faster response time, and good selectivity. Miniaturized Cu-ZnO rod-based sensors can serve as a good candidate for effective H2 detectors with low power consumption.
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