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Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

Sensor CalibrationPrecision MeasurementEngineeringStraightness Motion ErrorMeasurementCalibrationMechanical EngineeringMechanical SystemsEducationMeasurement SystemKinematicsInstrumentationPrecision Mechanical TestingInclinometerMulti-probe Measurement SystemXy Linear Stage