Electrostatic micro power generation from low-frequency vibration such as human motion

Abstract

We developed an electrostatic micro power generator for low-frequency energy harvesting applications. This micro power generator consists of a new vibration structure and a new electret structure (stripe masked electret). The advantage of this micro power generator is the high power generation structure of both the controlled gap between electrodes and long-range movement at low frequency. This generator shows 40 µW of power output at very low frequency vibration (2 Hz, 0.4 G).