IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1988 · 13 citations · 5 references
EngineeringGlass-forming LiquidGlass FlowFluid MechanicsGlass MaterialComputational MechanicsMechanics ModelingGlass TransitionMechanicsNumerical SimulationMaterials ScienceSurface Free EnergyPhysicsSolid MechanicsMaterial MechanicsPhosphosilicate GlassNatural SciencesApplied PhysicsBorophosphosilicate GlassMultiscale Modeling
A model for the flow of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) has been developed and integrated into the SAMPLE process simulation program. The physical basis of the model is the deformation of the glass in such a way as to decrease the surface free energy; the kinetics of the deformation are assumed to be controlled by a surface diffusion process. The model is applicable to 2-D and quasi-3-D (cylindrically symmetric) structures. In addition, a related model has been developed for spin-on glass, polyimide, and photoresist. The theory of these models is discussed, and examples of simulations using these models are presented.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
5