Real three dimensional micro fabrication using stereo lithography and metal molding

Abstract

A technique for three-dimensional micro fabrication using stereo lithography is proposed. It is called the IH process (integrated hardened polymer stereo lithography) and is suitable for microstructures made of both polymer and metals. The experimental apparatus developed and the fabrication of various 3-D microstructures, such as bending pipe, connected pipe, microcoil spring, and one-way valve, are described.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>