On-Wafer LSNA measurements including dynamic-bias

Abstract

A novel set-up extending Large Signal Network Analyzer (LSNA) capabilities is described in this work. The new set-up allows the simultaneous on-wafer measurement of high-frequency response (600 MHz-50 GHz) and currents/voltages induced at low-frequency scale (10 kHz-24 MHz) when the nonlinear DUT is excited by a periodic modulated signal. Experiments carried out on FinFET devices are reported. It will be shown that, in certain conditions, the contribution of low-frequency information cannot be disregarded as it causes a significant discrepancy to appear in the current/voltage at the DUT terminals.