Investigation of piezoelectric ZnO film deposited on diamond like carbon coated onto Si substrate under different sputtering conditions - Concepedia

Concepedia

Publication | Closed Access

Investigation of piezoelectric ZnO film deposited on diamond like carbon coated onto Si substrate under different sputtering conditions

38

Citations

7

References

2003

Year

I‐Tseng Tang, Y.C Wang, Chien-Wen Hwang

Journal of Crystal Growth

Materials ScienceMaterials EngineeringSi SubstrateDiamond-like CarbonEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsDifferent Sputtering ConditionsPiezoelectricityMicroelectronicsPiezoelectric Zno FilmThin Film Processing

References

	Year	Citations

Page 1