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Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering

Materials ScienceMaterials EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsNanomechanical PropertiesGlass SubstrateGallium OxideRf-magnetron SputteringThin FilmsThin Film Processing