A SP2T and a SP4T switch using low loss piezoelectric MEMS

Abstract

This paper presents Single Pole Double Throw (SP2T) and Single Pole Four Throw (SP4T) switches using piezoelectric micro-electro-mechanical (MEMS) switches measured from DC to 50 GHz. The overall performance of the switches shows better than 20 dB isolation up to 50 GHz when the MEMS switches are in the off or zero volt state. When the switches are actuated with 7 V, the SP2T shows less than 1.8 dB of insertion loss while the SP4T shows less than 2 dB of insertion loss, on average, up to 40 GHz. In addition, an undercut in the device is introduced in the junction region of the switches to allow for increased power handling and the response shows negligible change compared to the original switch design.