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Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes

Chen–Fu Chien, Stéphane Dauzère‐Pérès, Hans Ehm, John Fowler, Zhibin Jiang, Shekar Krishnaswamy, Tae‐Eog Lee, Lars Mönch, Reha Uzsoy

European J of Industrial Engineering · 2011 · 90 citations · 0 references

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TL;DR

The paper reviews semiconductor manufacturing and reports on a panel discussion at the 2008 MASM conference that examined the role of modelling and analysis in a shrinking world and outlines future research challenges. The panel included eight participants from Asia, Europe, and the USA, with equal industry and academic representation, who discussed company‑specific modelling problems and the evolving role of modelling in research. Panelists highlighted both challenges and successes of applying modelling and analysis in a globalised semiconductor manufacturing context.

Abstract

This paper presents a brief overview of semiconductor manufacturing followed by the results of a panel session held at the Fourth International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) in Miami, December 10, 2008 on the role of modelling and analysis in semiconductor manufacturing in a shrinking world. Three participants are from Asia, two from Europe, and two from the USA in addition to the two panel organisers (Fowler and Monch). At least one panellist from each continent is from industry and one from academia. The statements of the panellists from industry relate to modelling and analysis problems found in their own companies. Those of the academic panellists describe the role that modelling and analysis has played and is expected to play in their semiconductor manufacturing research. Their views on the challenges and successes of modelling and analysis in a globalised world are also included. Finally, we identify some future research challenges for semiconductor manufa...