Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modes

Abstract

The α and γ modes of an atmospheric pressure, radio-frequency plasma have been investigated. The plasma source consisted of two parallel electrodes that were fed with helium and 0.4 vol% nitrogen. The transition from α to γ was accompanied by a 40% drop in voltage, a 12% decrease in current and a surge in power density from 25 to 2083 W cm−3. Optical emission confirmed that sheath breakdown occurred at the transition point. The maximum light intensity shifted from a position 0.25 mm above the electrodes to right against the metal surfaces. The average density of ground-state nitrogen atoms produced in the atmospheric plasma was determined from the temporal decay of N2(B) emission in the afterglow. It was found that 5.2% and 15.2% of the N2 fed were dissociated into atoms when the plasma was operated in the α and γ modes, respectively. The lower efficiency of the γ discharge may be attributed to the non-uniform distribution of the discharge between the electrodes.