Development of Energy-Filtered Reflection High-Energy Electron Diffraction Apparatus

Abstract

A new type of reflection high-energy electron diffraction (RHEED) apparatus equipped with an energy filter has been developed. The apparatus can exclude the inelastically scattered electrons from the RHEED pattern for the first time. Performance of the apparatus is demonstrated using a Si(001)2×1 surface. The energy-filtered RHEED (EF-RHEED) can extract valuable information from the background. Furthermore, it can be used to measure energy loss spectra of diffraction spots.